vacuum pump(真空泵).ppt

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1、UnitⅡ.VacuumPumpsVacuumpumpsbeconcernedwith与…相关pumpingmechanism:loweringthemoleculesnumbercompression-expansion:pistonpump（活塞）liquidringpump（液环）rotarypumpRoot’spumpDragbyviscosity(黏性）:vaporejectingpumpDragbydiffusioneffect:vapordiffusionpumpmoleculardrag:molecular

2、pumpionizationeffect:ionpumpphysical/chemicalsorptionpump:sorptionpump,cryopump(低温）,gettering(吸气）pump2.1PrinciplesofpumpingAsortofpumpGastransferpumpsremovegasparticlesfromthesystem.Therearerotaryvanepump,turbomolecularpumpanddiffusionpumpingastransferpumps.Entrap

3、mentpumpsinwhichgasparticlesthathaveenteredfromthesystemaretrappedeitherchemicallyorphysicallywithinthepump.Therearesputterionpump,sublimationpumpandsorptionpumpinentrapmentpumps.Vacuumpumpscanbeclassifiedaseithergastransferpumpsorentrapmentpumps,accordingtotheiro

4、verallpumpingmechanism.VACUUMPUMPINGMETHODSSlidingVaneRotaryPumpMolecularDragPumpTurbomolecularPumpFluidEntrainmentPumpVACUUMPUMPS(METHODS)ReciprocatingDisplacementPumpGasTransferVacuumPumpDragPumpEntrapmentVacuumPumpPositiveDisplacementVacuumPumpKineticVacuumPump

5、RotaryPumpDiaphragmPumpPistonPumpLiquidRingPumpRotaryPistonPumpRotaryPlungerPumpRootsPumpMultipleVaneRotaryPumpDryPumpAdsorptionPumpCryopumpGetterPumpGetterIonPumpSputterIonPumpEvaporationIonPumpBulkGetterPumpColdTrapIonTransferPumpGaseousRingPumpTurbinePumpAxialF

6、lowPumpRadialFlowPumpEjectorPumpLiquidJetPumpGasJetPumpVaporJetPumpDiffusionPumpDiffusionEjectorPumpSelfPurifyingDiffusionPumpFractionatingDiffusionPumpCondenserSublimationPumpPUMPOPERATINGRANGES10-1210-1010-810-610-410-2110+2P(mbar)RoughVacuumHighVacuumUltraHighV

7、acuumVenturiPumpRotaryVaneMechanicalPumpRotaryPistonMechanicalPumpSorptionPumpDryMechanicalPumpBlower/BoosterPumpHighVac.PumpsUltra-HighVac.Pumps2.2parameterandclassificationultimatepressurelowestpressureatitsinletleakagevapourpressurepressurerange(usefulpumpingac

8、tion)adjacent相近的pumpingspeed(functionofpressure)Thepumpingspeedisthevolumetricflowthroughthepump’sintakeport.specificexhaustpressureselectivity抽气选择性comp