资源描述：
《Design Criteria of Low-Power Oscillators for》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、IEEETRANSACTIONSONINDUSTRIALELECTRONICS,VOL.61,NO.1,JANUARY2014567DesignCriteriaofLow-PowerOscillatorsforConsumer-GradeMEMSResonantSensorsGiacomoLangfelder,AlessandroCaspani,andAlessandroTocchioAbstractThispaperdiscussestheconstraintsinthedesignTheea
2、rlyresearchandindustrialinvestmentshavethuscre-ofcircuitsformicroelectromechanicalsystems(MEMS)resonantatedanincreasinglydeeperriftbetweencapacitivesensingandsensorsinconsumerapplications,presentsanovelintegratedothersensingtopologies,whosecompetitiv
3、enessmustunavoid-circuitimplementation,andshowsthatthisapproachcanbecom-ablyfacetheproblemofpowerconsumption,togetherwithpetitivewithrespecttothemostlyusedcapacitivereadout.Fromacircuitdesignperspective,itisshownhowthelargeequivalentperformanceandare
4、aoccupation.Amongotherpossiblesens-resistancetypicalofMEMSresonators,theiroperationclosetoingschemes,oneofthemostpromisingand,thus,oneofthemechanicalnonlinearity,andtheeffectoffeedthroughcapaci-mostinvestigatedisresonantsensing.Inthiskindofdevices,at
5、ancesontheoscillatingloopconstrainthepowerrequirementschangeinthequantitytobemeasureddeterminesachangeinofthedriving/readoutelectronics.Asacasestudy,aresonanttheresonancefrequencyofsuitablydesignedresonatorsusuallyaccelerometerbuiltinanindustrialproc
6、essiscoupledtoasuit-ablydesignedtransimpedanceamplifierwithalow-powerhardkeptinoscillationthroughunity-gainzero-phaseclosed-looplimiter.Theperformanceshownintermsoflinearityacrossthecircuits.Thisfrequencychangeisachievedthroughasuitablemeasurementrang
7、e(±8g),minimummeasurableaccelerationmechanicaldesign.Examplesofthisapproachcanbefoundfor(1mgwithareadoutbandwidthof100Hz),andpowerconsump-accelerometers[12][14],gyroscopes[15],andevenmagne-tion(≈100μWperaxis)iscomparabletothoseofstate-of-the-arttomet
8、ers[16].capacitiveinertialsensors.ItisthefirstgoalofthispapertorevisitthetheoreticalIndexTermsAccelerometers,low-powercircuits,micro-aspectsinthedesignofanintegratedcircuitforresonantelectromechanicalsystems(MEMS)sensors,resonators,trans-MEMSsensors,b
