晶体生长计算软件FEMAG系列之晶体生长各种方法.ppt

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1、晶体生长计算软件FEMAG之晶体生长方法汇编BulkCrystalsMaterialsFEMAGSoft©2010Wholeindustriesrelyonbulk-growncrystalsofavarietyofmaterialsSilcion/GermaniumforsemiconductorandsolarindustryIII-Vcompunds(GaAsInpInSbSiCGaNetc)fortelecommication,LED,defenseandsolarindustryHgCdTeforinfraredimagingFluoride/Halide/oxides

2、cintillatorcrystalsforhigh-energyphysics,medicalimagingandopticalindustriesetc.BulkCrystalGrowthMethodsFEMAGSoft©2010Czochralski(CZ)FloatingZone(FZ)DirectionalSolidification(DSS)Vertical/HorizontalBridgman(VB)VerticalGradientfreeze(VGF)PhysicalVaporTransport(PVT)SiliconCrystalGrowthMethodFEMA

3、GSoft©2010StringRibbon(PatentedbyEVERGREEN)EFGHotzoneimportanceFEMAGSoft©2010ThekeyimportantthingforallgrowthprocessesistheHotzoneandassociatedoperatingcondtions,whichcontrolthemajorcharactersticsofcrystals,andthestructureofthehotzoneandassociatedoperatingconditionsarethemajorknow-howofeachIC

4、wafermanufacturers.CzochralskiGrowthMethodFEMAGSoft©2010FEMAGSoft©2006CzochralskiGrowthMethodFEMAGSoft©2010FEMAGSoft©2006CzochralskiMethodAround90%singlecrystalgrownbyCzmethodinICindustryPartofGermaniumcrystalgrownbyCZmethodSappherandlotsCompoundcrystalgrownbyCZoritsvariants,suchasKyropoulos,

5、LECetc.MarketshareofCZwaferinsolarmarketslightlylowerthanDSSmcwaferCzochralskiGrowthMethodFEMAGSoft©2010FEMAGSoft©2006HottopicsonceinICindustry,andcurrentlyhottopicsforsolar:allaboutgrowthyield,andthenqualityimprovementCCZwithmulti-meltpartitionsMCZGrowthrateimprovementImpuritycontrol(oxygen,

6、carbon)anddopantsmicrovoidsanddislocationsoncellefficiencyCzochralskiGrowthMethod(MCZ)FEMAGSoft©2010FEMAGSoft©2006Costreductionislimitedwithrespectedtotheequipments/consumablesmodificationsInnotativeeffortsarerequiredtofurtherbeimprovedCzochralskiGrowthMethod(MCZ)FEMAGSoft©2010FEMAGSoft©2006V

7、ertical:Cusp:Horizontal:FEMAGSoft©2006CzochralskiGrowthMethodFEMAGSoft©2010FEMAGSoft©2006Itisassumedthatforacertainregionofthethermalstressesthecrystalisinametastablestate,andacertainperturbationenergyisnecessarytoleavethismetastablestate.Byt