li_cu共掺杂zno纳米薄膜的溶胶凝胶法制备_李建昌

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1、------------------------------------------------------------------------------------------------Li_Cu共掺杂ZnO纳米薄膜的溶胶凝胶法制备_李建昌DOI:10.13385/j.cnki.vacuum.2012.03.002第49卷第3期2012年5月真空VACUUMVol.49,No.3May.2012Li-Cu共掺杂ZnO纳米薄膜的溶胶凝胶法制备李建昌，姜永辉，王博锋，巴德纯（东北大学机械工程及自动化学院真空与流体工程中心，辽宁沈阳110004）摘*要：采用

2、溶胶-凝胶法,通过调整氯化锂和氯化铜的摩尔比在不同基片上制备了不同Li-Cu共掺杂扫描电子显微镜、透射电子显微镜、紫外可见光分光光度计和伏安浓度的ZnO薄膜。利用X射线衍射仪、特性测试等表征了薄膜的结晶状况、表面形貌及光电特性。结果表明：所得Li-Cu共掺杂ZnO薄膜为六角共掺杂ZnO薄膜结晶度增强，晶粒长大，纤锌矿多晶结构，有CuO杂质相生成。随Li和Cu摩尔比增加，样品表面不平整度增加。CuO颗粒的出现，使得共掺杂ZnO——————————————————————————————————————------------------------------

3、------------------------------------------------------------------薄膜透射率降低，透光性较差。Li与Cu摩尔共掺杂ZnO薄膜的综合导电性最好。比为1:1时，关键词:溶胶-凝胶法；ZnO；薄膜；Li-Cu共掺杂；光电特性中图分类号：O484.4文献标识码：A文章编号：1002-0322（2012）03-0051-04PreparationandcharacterizationofLi-Cuco-dopedZnOthinfilmsbysol-gelmethodLIJian-chang,JIANGY

4、ong-hui,WANGBo-feng，BADe-chun（VacuumandFluidEngineeringResearchCenter,SchoolofMechanicalEngineeringandAutomation,NortheasternUniversity,Shenyang110004,China）Abstract:Li-CucodopedZnOthinfilmswerefabricatedonvarioussubstrateswithdifferentmolarratiosbetweenthecopper———————————————————

5、———————————————————------------------------------------------------------------------------------------------------chlorideandlithiumchloridebysol-gelmethod.ThesampleswerecharacterizedbyX-raydiffraction,scanningelectronmicroscopy,transmissionelectronmicroscopy,ultraviolet-visiblesp

6、ectrophotometerandcurrent-voltagemeasurements,respectively.EffectsofLi-Cucodopingonthemicrostructure,surfacemorphologyandphotoelectricalpropertiesoftheZnOthinfilmsaresystematicallyinvestigated.TheZnOthinfilmsshowtypicalhexagonalwurtzitestructurewithsomeCuOphase.Withincreaseofdoping

7、molarratiobetweenCuandLi,thesamplecrystallinitygetsbetterandthegrainsgrowupgradually.TheLi-CucodopedZnOthinfilmsshowlowvisiblelighttransmittanceasresultedfromtheformationofCuOgrains.WhenthedopingmolarratiobetweenCuandLiis1:1,thesampleshowsthebestconductivity.Keywords:sol-gel;ZnO;th

8、infilm;Li-Cucodoping;photo