平面干涉仪参考面的高精度标定方法研究

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1、密级无分类号ＴＨ７４１＿ｆ知料掌Ｘ＇ＩＡＮＴＥＣＨＮＯＬＯＧＩＣＡＬＵＮＩＶＥＲＳＩＴＹ硕士学位论文＾平面干涉仪参考面的高精度标定方法研究赵思伟作者：指导教师：田爱玲教授申请学位学科：光学工程２０１８年５月２０曰密级无分类号TH741XI’ANTECHNOLOGICALUNIVERSITY硕士学位论文题目:平面干涉仪参考面的高精度标定方法研究作者：赵思伟指导教师：田爱玲教授申请学位学科：光学工程2018年5月20日通过理论分析、仿真和实验，验证了结合Zernike多项式的三平面互检面形标定的方法和重力变形补偿标定方法的可靠性，为大

2、口径平面的高精度加工和检测提供了重要的支撑作用。关键词：光学检测；参考面标定；有限元分析；自重变形；变形补偿thegravitydeformationofupto20nm.Then,theinfluenceofthedeformationofthereferencesurfaceonthecalibrationresultsofthethree-planecross-checksurfaceofZernikepolynomialswasanalyzed,andthedeformationafterdeformationwasupto10nm.Onthebasisofthis,amethodt

3、ocompensatethedeformationofreferencesurfacegravitydeformationcomponentisproposed.Finally,experimentsonsomestandardplanesof100mmdiameterwerecarriedoutwithZygointerferometer,byusingZernikepolynomialfittingofthreeplanesurfaceshapefortheabsolutecalibrationmethod,fixedgravitydeformationintheinterference

4、wave.ThefinalcalculatedreferenceplaneisconsistentwiththePVofthenominalsurfaceshape.Throughthetheoreticalanalysis,simulationandexperiment,combinedwiththeZernikepolynomial,thisdissertationverifiesthemethodofthecalibrationofthetriplanemutualcalibrationandreliabilityofthecalibrationmethodofgravitydefor

5、mationcompensation,whichprovidesimportantsupportforthehighprecisionmachiningandinspectionofthelargecaliberplane.Keywords:Opticaltest;Referencesurfacecalibration;Finiteelementanalysis;Selfweightdeformation;Deformationcompensation目录1绪论..................................................................

6、...........................................................11.1课题研究目的及意义.............................................................................................11.2国内外研究现状.....................................................................................................11.2.1参考面标定的国内外现状.....

7、.....................................................................11.2.2平面装夹方式的现状..................................................................................31.3本论文主要研究内容...........................