化学沉积稀土多元钴基软磁薄膜结构和性能的研究

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1、化学沉积稀土多元钴基软磁薄膜结构和性能的研究’攘妥零文采用正交实验和回归分析的方法t确患了稀±他学沉积Co-Ni-B·RE、co，F即B．RE多元钴蒸敬磁薄膜的]：艺流程、镀液配方和实验参数，并通潋对合畿镀瑟鹣壤势翥鬣嚣是、澎羲蘩掏努錾鬻力学爨攀链蕤谤嵇，翳巍了穗主嚣素、裁声波、磁场奔入化学淡积多元镳基较戳薄膜工戆最，jl壹念金成分、绩梭鞠性能舱作用机制。结果显示化学沉积Co．Ni．B、cmFe-BI艺程稀土元辫(Ce、La、Y、D，)、麓耋f麓声波、激殇)赍入螽，满积过程、台金藏势、毽襟形藐结鞫释褴蘸帮寒摄蔷变鼗，表溪褒；簇滚熬舞投辍谯过

2、皂像鼗援馥嶷陲爨，沉蔽逮嶷挺毫；镀膳的结合力、表巅咸量改善；镀层巾过渡族冗索的禽鼹增加，轻元素硼的含避薄低，同对谶察了稀±元素与j尊渡族元蔗共沉稠的可臆髓；镀艨的显礅结构由咎鑫銮瓣疆鑫黟多菇态蒋变；骧藤懿显徽疆塞与辩窭夔黎糍。力攀链戆褒爨；镀蘩的娇黻力降低；磁导攀提高：锻堪鲢磁化强度农能量《越声波、磁坯)耧轻穗土元素Ce、La介入后提瀚，莺稀土元素Y舟入后降低。此外渐合金镀艨经250℃和500℃蕊羧建后；薄簇蔻髓褒铯；力学程虢教善；觏缮热；Ms、社程250"C热楚理辩燕窝、在500℃热楚鬻辩醛德a关键谰；化学沉积黼士元素，超声波磁场软磁性黻

3、∥、／‘一／“gk”TheStudyontheMicrostructureandPropertiesofElectrolessPlatingMulticomponentCobaltBasedSoftMagneticFilmwithRareEarthJoinedAbstractThispaperdeterminesthetechnologicalprocess，bathformularizstionandexperimentalparameterofetectrolessmulticomponentcobaltbasedsoftmagneti

4、cfilmwithrareearthelementsjoinedsuchasCo-Ni-B—REandCo—Fe-B-REbythemeansofperpendicularexperimentandregressionanalysis．Thispaperalsostudiestheactivemechanismofrareearthelements,ultrasonicirradiationandmagneticfieldontheplatingprocess，chemicalcomponent，surfaceconfiguration，m

5、icrostructureandpropertiesofelectrolessmulticomponentcobaltbasedsoftmagneticfilminthewayofexamininginthecomponent，microstmctureandpropertiesofsuchalloy．Theresultshowsthatwiththeadditionofrareearthelements，ultrasonicirradiationandmagneticfield，thechemicalcomponent，surfaceco

6、nfiguration，microstmctureandpropertiesofelectrolessCo-Ni-BandCo—Fe—Balloychangesremarkably．SuchkindofchangecanbedescribedasthefollowingsFirstlythedepositingspeedofelectrolessalloybathisraisedwhilethepolarizabilityandcathodicoverpotentialarereduced；Secondlythesurfacequality

7、ofthealloycoatingandadhesionofthecoatingandmatrixareimproved；Thirdlyinthecoatingsthecontentoftheelementsinthetransientgroupincreases，butthecontentofcobaltdecreased；FourthlytheamorphousstructureistransformedtomicrocrystaIstructureandpotycrystalstructure；Fifthlythemicrohardn

8、essandwearresistanceofthecoatingareenhanced；Sixthlycoercitiveforceisreduced，andmagnetocon