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1、SpringerSeriesinmaterialsscience142SpringerSeriesinmaterialsscienceEditors:R.HullC.JagadishR.M.Osgood,Jr.J.ParisiZ.WangH.WarlimontTheSpringerSeriesinMaterialsSciencecoversthecompletespectrumofmaterialsphysics,includingfundamentalprinciples,physicalproperties,materialstheoryanddesign.Recognizingt
2、heincreasingimportanceofmaterialsscienceinfuturedevicetechnologies,thebooktitlesinthisseriesreflectthestate-of-the-artinunderstandingandcontrollingthestructureandpropertiesofallimportantclassesofmaterials.PleaseviewavailabletitlesinSpringerSeriesinMaterialsScienceonserieshomepagehttp://www.sprin
3、ger.com/series/856LarsRebohleWolfgangSkorupaRare-EarthImplantedMOSDevicesforSiliconPhotonicsMicrostructural,ElectricalandOptoelectronicPropertiesWith121Figures123Dr.LarsRebohleDr.WolfgangSkorupaForschungszentrumDresden-Rossendorfe.V.InstitutfurIonenstrahlphysikundMaterialforschung¨BautznerLandst
4、raße400,01328Dresden,GermanyE-mail:l.rebohle@fzd.de,w.skorupa@fzd.deSeriesEditors:ProfessorRobertHullProfessorJurgenParisi¨UniversityofVirginiaUniversitatOldenburg,FachbereichPhysik¨Dept.ofMaterialsScienceandEngineeringAbt.Energie-undHalbleiterforschungThorntonHallCarl-von-Ossietzky-Straße9–11Ch
5、arlottesville,VA22903-2442,USA26129Oldenburg,GermanyProfessorChennupatiJagadishDr.ZhimingWangAustralianNationalUniversityUniversityofArkansasResearchSchoolofPhysicsandEngineeringDepartmentofPhysicsJ4-22,CarverBuilding835W.DicknsonSt.CanberraACT0200,AustraliaFayetteville,AR72701,USAProfessorR.M.O
6、sgood,Jr.ProfessorHansWarlimontMicroelectronicsScienceLaboratoryDSLDresdenMaterial-InnovationGmbHDepartmentofElectricalEngineeringPirnaerLandstr.176ColumbiaUniversity01257Dresden,GermanySeeleyW.MuddBuildingNewYork,NY10027,USASpringerSeriesinMaterialsScienceISSN0933-033XISBN978-3-642-14446-2e-ISB
7、N978-3-642-14447-9DOI10.1007/978-3-642-14447-9SpringerHeidelbergDordrechtLondonNewYorkLibraryofCongressControlNumber:2010938144©Springer-VerlagBerlinHeidelberg2010Thisworkissubjecttocopyright.Allrightsarereserved,whetherthew
