Design， fabrication， and testing of MEMS solid propellant thruster array chip on.pdf

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1、SensorsandActuatorsA157(2010)126–134ContentslistsavailableatScienceDirectSensorsandActuatorsA:Physicaljournalhomepage:www.elsevier.com/locate/snaDesign,fabrication,andtestingofMEMSsolidpropellantthrusterarraychiponglasswaferJongkwangLee,KyunghwanKim,SejinKwon∗DepartmentofAerospaceE

2、ngineering,KoreaAdvancedInstituteofScience&Technology,373-1Guseong-dong,Yuseong-gu,Daejeon305-701,RepublicofKoreaarticleinfoabstractArticlehistory:Thispaperpresentstheinternalballisticdesign,fabricationprocedure,andperformanceevaluationofReceived15April2009amicro-electromechanicals

3、ystems(MEMS)solidpropellantthrusterarraychip.TheinternalballisticReceivedinrevisedform3September2009designwascarriedouttopredicttheperformanceofthethruster.TwodifferentignitionmodelswereAccepted12November2009used.Thenumericalresultsgaveamaximumthrustof3840mN,andatotalimpulseof0.42m

4、NsattheAvailableonline18November2009localignitionmodel.Aphotosensitiveglasswaferonlywasusedasthebarematerialforthethruster.Thestabilityofthemicro-igniterwasimprovedbyusingaglassmembranewithathicknessoftensofKeywords:microns.Theaveragethicknessofthemembranewas35m.Theproposedmicro-i

5、gniterhadalevelofMEMSthrusterpowerconsumptionappropriatetoignitethesolidpropellant.Thethermal,electrical,andmechanicalMicro-igniterIgnitioncharacteristicsofthefabricatedmicro-igniterweremeasured.ThesolidpropellantwasloadedintotheGlassmembranepropellantchamberwithoutresorttoaspecial

6、techniqueduetothehighstructuralstabilityoftheglassSolidpropellantmembrane.AnMEMSsolidpropellantthruster(MSPT)arraywasfabricatedthroughanisotropicetchingofphotosensitiveglass.Anignitioncontrolsystemwasdevelopedtocontroltheignitionsequence.Ignitionandcombustiontestsofthefullyassembly

7、MEMSthrusterwereperformedsuccessfully.Theminimumignitiondelaywas27.5mswithanignitionenergyof19.3mJ.Theaverageofthemeasuredmaximumthrustandtotalimpulsewere3619mNand0.381mNs,respectively.©2009ElsevierB.V.Allrightsreserved.1.IntroductionThisdesignalsoencounteredproblemsrelatedtochemic

8、aldecom-positiontime[7].Kö