柔性神经微电极的制备与微加工工艺研究

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1、上海交通大学硕士学位论文柔性神经微电极的制备与微加工工艺研究姓名：李博申请学位级别：硕士专业：微电子学与固体电子学指导教师：惠春20070101上海交通大学硕士学位论文基底厚度均匀，致密性好，且性能稳定。在柔性神经微电极的制备过程中，整体工艺流程的设计和掩模层材料的选择是比较关键的步骤。通过采用金属铝作掩模，最终制备出柔性神经微电极，并采用电化学分析的方法搭建了测试系统。测试结果显示，在一定的频率范围内45（10Hz～10Hz），该微电极阻抗值低（1000Ω～400Ω），相位延迟小（-20度左右

2、），说明实验加工出的柔性神经微电极性能良好。在此基础上，还探讨了视网膜修复的三维神经微电极。关键词：柔性神经微电极，视网膜修复，聚对二甲苯，微细加工II上海交通大学硕士学位论文THEFABRICATIONOFFLEXIBLENEUROLMICROELECTRODESANDRESEARCHINGONMICROMACHININGPROCESSABSTRACTNeuralmicroelectrode,whichisalsocalledbiologicelectronicalinterface,isth

3、estructureofelectrodesinwhichthesignaltransmitsbetweenelectronandlivecellularorganizing.Theexternalsignalofcellcanberecordedpassivelythroughelectriclivecellularorganizingbymicroelectrodeorwecanstimulatethecellsbyelectricsignal.Itbelongstothecrossedre

4、gionofbiomedicineengineeringscienceandmicro-electromechanicalsystems(MEMS).Aimingatthesuffererswhohaveretinitispigmentation(RP)oragerelatedmaculardegeneration(ARMD)diseasesintheworld,weresearchonfabricatingmicroelectrodearraysontheflexiblefoundationo

5、fParyleneinordertomaketheeyesinblindnessorbeinginblindnessobtainpartialeyesightoveragainbyreplacingpartfunctionofretina.Thinkingabouttheorganicstructureofhuman’seyes,biologiccompatibilityandlong-termstabilizationofneuralmicroelectrodesandIII上海交通大学硕士学

6、位论文themethodwhichadoptsthemethodofembeddingartificialbodyinthefrontofretina;wedesignthestructureofflexibleneuralmicroelectrodesasfollows.ThedimensionofParylenefoundationis3200μm×1000μm×8μm.ThediameterandthicknessofTi/Ptelectrodesis200μmand10nm/300nmr

7、espectively.Therearesixteenelectrodesbetweenwhichthespaceis200μm.Thedown-leadismadebymaterialofPtorAuandthewidthis50μm.Inordertoplayafunctionofinsulating,wedepositalayerofParyleneandexposuretheportionofmicroelectrodesanddown-leadinterface.Atthesameti

8、me,wealsoimprovethebiologiccompatibilityandlong-termstabilization.TheprocessflowingisdesignedaccordingtothestructureofmicroelectrodeandwefabricateParylenefoundationthroughCVD.Theresultshowsthatthethicknessoffoundationisuniformandcompact.Intheprocesso