mems in FR filter applications

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1、2.2MEMSinRFFilterApplications:Thin-filmBulkAcousticWaveTechnologyR.Aigner,InfineonTechnologies,Munich,GermanyAbstractRF-MEMSfilterswillreplaceconventionalfiltersinmobilecommu-nicationastheyofferbetterperformanceatlowercost.Requirementsandkeyperformanceparametersforfiltersinnext-gener

2、ationmobileapplicationsarereviewedindetail.ThefundamentalsofRF-MEMSfilters–andinparticularthin-filmbulkacousticwave(BAW)filters–aresummarizedinacomprehensiveform.Thestate-of-the-artinBAWfiltersandfuturetrendsarepresented.Supplementaryinforma-tioncoversmanufacturingandcommercializatio

3、nissues.Keywords:RF-MEMSfilter;bulkacousticwave(BAW)filter;filmbulkacousticresonator(FBAR);solidlymountedresonator(SMR)Contents2.2.1Introduction........................................1762.2.1.1ApplicationFieldsforRFFilters..........................1762.2.1.2TypesofRFFilters.........

4、..........................1782.2.1.2.1CeramicFilters......................................1792.2.1.2.2SurfaceAcousticWave(SAW)Filters......................1792.2.1.2.3RF-MEMSFilters....................................1802.2.1.3RFFilterRequirementsforMobilePhones...................181

5、2.2.2OverviewonMEMSinRFApplications....................1822.2.2.1ElectricalField-drivenMEMSResonators...................1842.2.2.2BulkAcousticWaveResonators..........................1842.2.3FundamentalsofBulkAcousticWave(BAW)Resonators.........1852.2.3.1Membrane-typeBAWResonators....

6、.....................1861762.2MEMSinRFFilterApplications2.2.3.2SolidlyMountedBAWResonators........................1872.2.3.3MaterialConsiderationsforthePiezolayer...................1882.2.3.4KeyPerformanceParametersforBAWTechnology.............1902.2.3.5ChallengesinProcessingofBAWDev

7、ices...................1922.2.3.6DiagnosticMethods...................................1932.2.4BulkAcousticWaveFilters.............................1942.2.4.1ConstructionPrincipleofBAWFilters......................1952.2.4.2TypesofBAWFilters.................................1962.2.4.2.1La

8、dderFilters.