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1、NewMEMSMicrospectrometerforInfraredAbsorptionSpectroscopyMartinEbermann,NorbertNeumannInfraTecGmbH,GostritzerStrasse61-63,01217Dresden,GermanyAbstractInthispaperwepresentbasicdesigns,operationconceptsandsomeapplicationexamplesofanovelmicrospectrometerforthespectralrangeof3
2、-5µm,whichisbasedonapyroelectricdetectorwithaninte-gratedmicromachinedFabry-Perotfilter(FPF).Wediscusstheinfluenceofdifferentopticalsetupsonthespectralresolutionandthesignal-to-noiseratioofthemicrospectrometer.Twobasicoperationmodes,step-scanmodeandcontinuous-sweepmodeared
3、emonstrated.Suchadevicehasalargepotentialinthefieldofinfraredabsorptionspectroscopy,particularlyifmulticomponentmixtureshavetobeanalyzed.IntroductionInfraredabsorptionspectroscopyiswellestablishedingasanalysis,fireandflamedetectionandinmanyotherapplications.Atypicalinfrare
4、danalyzerconsistsofabroadbandlightsource,asamplecellandatleastonebutinmostcasesseveralspectralmeasurementchannelswithfixednarrowbandpassfilters.Thefiltersareselectedtomatchthecharacteristicabsorptionbandsthatareofinterestineachspecificapplication.Thisisoftenrealizedbyusing
5、detectorswithseveralspectralchannelsorarotatingfilterwheelinfrontofasinglechanneldetector.Theincreasingdemandincollectingmoreandmorespectralinformation,reducingcrosssensitivities,makingmeasurementsfasterandlastbutnotleastinminiaturizationofsuchsystemsischallenging.Theabove
6、mentionedconventionalapproachmainlysuffersfromthedisadvantage,thatthenumberofchannelsislimited.Thereareseveralwellknownproblems,forexampleregardingahomogeneousdetectorilluminationandlong-termstability.Filterwheelscannotbeminiaturizedandtheirreliabilityisnotsufficient.Whati
7、nfactisneededisalowresolving,robustandlowcostmicrospectrometerforthemid-waveinfraredrange.Manyapproachesformicrospectrometersarebasedondiffractiongratings[1].AttemptstominiaturizetheFTIRtechniquehavealsobeenreported[2].Someofthesesolutionsofferarelativelyhighspectralresolu
8、tionandfastmeasurements,butthedegreeofintegrationandminiaturizationisoftennotveryhigh.Man
