Stick_Diagrams(棒状图)

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1、StickDiagramFundamentalsbyJohnP.UyemuraProfessorofElectricalandComputerEngineeringGeorgiaInstituteofTechnologyAtlanta,GAUSAThispresentationwaswrittentoaccompanythebookIntroductiontoVLSICircuitsandSystems,©2001byJohnWiley&Sons,Inc.Allrightsreserved.Nopartofthisdo

2、cumentmaybereproducedwithoutthewrittenpermissionofthecopyrightholder.IntroductionStickdiagramsareusefulforplanningthelayoutandroutingofintegratedcircuits.Inastickdiagram,everylineofaconductingmateriallayerisrepresentedbyalineofadistinctcolor.Inourstudy,wewilluse

3、thebasiccolorcodingbelow:Polysilicon(gate)Active(n+orp+Metal1n-WellboundaryOtherlayerswillbeintroducedlater.Thewidthofalineisnotimportant,asstickdiagramsgiveonlywiringandroutinginformation.InterpretationAsdiscussedinthebook,aVLSIcircuitmaybeviewedasa3-dimensiona

4、lsetofpatternedmateriallayers.Stickdiagramsprovideatopviewofthepatterns.Thecolorsallowustotracesignalflowpathsthroughtheconductinglayersinacomplexintegratedcircuit.Astickdiagramisthusaschematicrepresentationofacircuitatthephysicaldesignlevel.Withalittlepractice,

5、youwillbeabletoreadastickdiagramandtranslateitintoaconventionalcircuitschematic.ÛnFETnFETOriginoftheColorsIntheearlydaysofMOSintegratedcircuitsitwasnoticedthatwhenachipwasilluminatedwithawhitelightsource,eachconductinglayerhadadistinctcoloringassociatedwithitwhe

6、nviewedunderamicroscope.n+PolynFETn+Thisobservationprovidedthebasisfordevelopingthetechnique:nFETOxidelayersappearedtransparent,sotheyarenotshown.BasicsWeassumethateveryconductinglayerisinsulatedfromeveryotherconductinglayer.Thisisachievedusingeithersilicondioxi

7、delayers(abovethesubstrate)orreverse-biasedpnjunctions(inthesilicon).OxideMetal1AcontactorviaisneededOxidePolyPlugtoconnecttwolayersn+Activen+ActiveSubstrate(grounded)FETsIntheself-alignedgateprocess,thepolysilicongatepatternandfieldoxide(FOX)actasmaskstothen+or

8、p+drain/sourceionimplant.IonsPolyPolyFOXFOXActiveimplantimplantSubstrateSubstrateWewillassumeap-typesubstrateinourdiscussion.Itisnotshownexplicitlyinthestickdiagram.I