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1、SEMIM19-91N/A©SEMI1991,1996SPECIFICATIONFORELECTRICALPROPERTIESOFBULKGALLIUMARSENIDESINGLECRYSTALSUBSTRATES1Introductionbeenincluded,astransitionmetalsareusefulacceptorimpurities.ForthespeciÞcation,threeprincipaltypesofmaterialwereidentiÞed:semi-insulating,n-type,andp-type.Section4deÞnestheresis
2、tivityandstabilityofsemi-Thisencompassesthefullrangeofconductivitychar-insulatingmaterialasspeciÞedinSection3.Astrin-acteristicsforGalliumArsenide(GaAs).Section3gentlimitwasplacedontheGradeA2materialtomin-considerssubclassesofthesecharacteristicsdeÞningimizethelikelihoodthatthismaterialconvertst
3、olowthespecieswhichmaybeusedforproducingthecon-resistivityuponannealing.Theissueofsurfacecon-ductivitytype.Forsemi-insulatingmaterial,specialversioninCr-dopedmaterialwasdealtwithbyelimi-caseshavebeenisolated.natingarequirementforn-typecharacteristicsfollowingannealing.Undoped,GradeA1representsth
4、osematerialswhichareofhighresistivityandstablefollowinggrowth,Theresistivityrangesforn-typeconductingmaterialwithoutnecessitatinganyadditionalannealingorpro-weredeterminedfromthecarrierconcentrationtablecessing.TheGradeA2material,"highpurity",requires(Section5)andmobilityvalues,usingtheanalysiso
5、fadditionalthermalprocessingfollowinggrowthtoWalukiewiczetal,J.Appl.Phys.50(1979)899.Thisbringtheresistivitytoalevel>107W-cm.Atthistime,placesaconstraintonthepermissiblecompensationmostproducershaveindicatedthatthemajorityoftheratio,selectedtobeintherangeofapproximately0.0GradeA2ingotshaveresist
6、ivitycharacteristicswhichto0.7.ThespeciÞcationwasdesignedthentoexcluderiseintotheacceptablerangeafteranappropriatether-abnormallypoorcrystals.Aslimiteddataanddemandmalcycle.However,thisphenomenonissensitivetoexistforp-typematerial,therearenorangesspeciÞedthedetailsofthetime-temperaturecycle,andt
7、hus,atthiswriting.ShouldasigniÞcantbodyofdatasuchanincreasecannotbeguaranteedineveryappli-evolve,thisspeciÞcationmaybedesignedandballotedcation.Thus,thelabel"GradeA2"isusedtodenoteasappropriate.thismaterial.Section5dealswith
