SEMI C51-0699 SPECIFICATION FOR XYLENES

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1、SEMIC51-0699SPECIFICATIONFORXYLENESThisspecificationwastechnicallyapprovedbytheGlobalProcessChemicalsCommitteeandisthedirectresponsibilityoftheNorthAmericanProcessChemicalsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonApril23,1999.Initiallyavaila

2、bleonSEMIOnLineMay1999;tobepublishedJune1999.ThisdocumentreplacesSEMIC1.21initsentirety.Originallypublishedin1978.equivalent(100%methylSiliconewhichhasbeen1Purposesurfacebondedandcrosslinked).1.1ThepurposeofthisdocumentistostandardizeColumnTemperature:40°Cisothermalfor5minutes,

3、requirementsforxylenesusedinthesemiconductorthenprogrammedto200°Cat10°C/min.industryandtestingprocedurestosupportthosestandards.TestmethodshavebeenshowntogiveInjectorTemperature:175°Cstatisticallyvalidresults.ThisdocumentalsoprovidesguidelinesforgradesofxylenesforwhichaneedhasD

4、etectorTemperature:250°Cbeenidentified.Inthecaseoftheguidelines,thetestSampleSize:0.2µLsplitlessmethodsmaynothavebeenstatisticallyvalidatedyet.CarrierGas:Heliumat3mL/minDetector:ThermalConductivityor2ScopeFlameIonization2.1ThescopeofthisdocumentisallgradesofxylenesApproximateRe

5、tentionusedinthesemiconductorindustry.Times(min):2.2Thismaterialisamixtureofortho,meta,andparaToulene14.4isomersandethylbenzene.Xylene(o-,m-,andp-iso-Ethylbenzene17.0mersandethylbenzene)99.0%minandEthylbenzenep-xylene16.918%max.m-xylene17.23Limitationso-xylene17.83.1None.8.1.1M

6、easuretheareasunderallpeaksbyanyconvenientmeansandcalulatetheconcentrationofall4ReferencedDocumentscomponentsinareapercent(seeSEMIC.1,SectionSEMIC1—SpecificationsforReagents3.11,GuidelinesforAssaybyWideBoreColumnGasChromatography).5Terminology8.2Color—Dilute2.0mLofplatinum-coba

7、ltstock5.1None.solution(APHANo.500)to100mLwithwater.Comparethisstandard(APHANo.10)with100mLof6PhysicalProperty(forinformationonly)sampleinNesslertubes.Viewverticallyoverawhitebackground.ThesamplemustbenodarkerthantheDensityat25°C0.86g/mLstandard.BoilingRange136-144°C8.3Acidity—

8、To25mLofwaterinaglass-stoppered7Requirementsflask,add1