SEMI S15-0200 SAFETY GUIDELINE FOR THE EVALUATION OF TOXIC

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1、SEMIS15-0200SAFETYGUIDELINEFORTHEEVALUATIONOFTOXICANDFLAMMABLEGASDETECTIONSYSTEMSThissafetyguidelinewastechnicallyapprovedbytheGlobalEnvironmental,Health,andSafetyCommitteeandisthedirectresponsibilityoftheNorthAmericanEnvironmental,Health,andSafetyCo

2、mmittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonDecember15,1999.InitiallyavailableonSEMIOnLineJanuary2000;tobepublishedFebruary2000.1Purpose3.6Thisguidelineprovidesneitheracomprehensivelistofallgases,norrecommendedareasfor

3、monitoring1.1Thisguidelineprovidesconsiderationsfortheoftoxicandflammablegases.evaluationoffixedgasdetectionsystemsusedtomonitorforsafetyofplantpersonnel,productand3.7Notallknownanalyticalmethodologiesformaterials,thelocalenvironmentandcommunity.Itmo

4、nitoringoftoxicandflammablegasesaredescribedprovidesanevaluationguideandreferencesourcesinthisguideline.appropriatetofacilitiesandequipmentwheretoxicandflammablegasesareusedandstoredingaseousor4ReferencedStandardsliquidform.4.1SEMIStandard2ScopeSEMIE

5、33—SpecificationforSemiconductor2.1ThisguidelineappliestotoxicandflammablegasManufacturingFacilityElectromagneticCompatibilitydetectionandaddressesperformancecharacteristicsofgasdetectionsystems.5Terminology2.2Italsodescribesseveraltechnologiesavaila

6、blefor5.1AbbreviationsandAcronymsdetectionofsuchgasesandtheirperformance5.1.1ACGIH—AmericanConferenceofGovern-characteristics.mentalIndustrialHygienists2.3Thissafetyguidelinedoesnotpurporttoaddress5.1.2EMI—Electromagneticinterferenceallofthesafetyiss

7、uesassociatedwithitsuse.Itistheresponsibilityoftheusersofthissafetyguidelineto5.1.3EU—EuropeanUnionestablishappropriatesafetyandhealthpracticesand5.1.4RFI—Radiofrequencyinterferencedeterminetheapplicabilityofregulatorylimitationspriortouse.5.1.5USEPA

8、—UnitedStatesEnvironmentalProtectionAgency3Limitations5.1.6USOSHA—UnitedStatesOccupationalSafety3.1ThisguidelinedoesnotincludeapplicablefireandandHealthAdministrationsafetycoderegulations.5.2Definitions3.2Thegasesorliquidswhichshouldbemonitored5.2.1c