TFT Array制程技术简介(20080917).pdf

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1、TFTArray製程技術~TheTechnologyofTFTArrayProcessing中小事業部產品設計總處面板設計處AR設計部isplayingyourvision!E/BandE/STFTStructureE/BTypeTFT&CsonCommonTFTArrayStructurePassivationSiNxDataLine&SourceGlassSubstrateGateInsulatorGateLineCsLine&CstE/STypeTFT&CsonGateTFTArrayStructurePassivationSiNxDataLine&

2、SourceGlassSub.isplayingyourvision!GateInsulatorGateLine&CstPixelElementsisplayingyourvision!5-PhotoExposureProcess(8)ITOPixelElectrodePatterning(Mask5)(7)ContactHole/WindowEtching(Mask4)(6)PassivationLayerCoverage(5)BackChannelEtchingforB/Estructure(4)S/DMetalPatterning(Mask3)Pas

3、sivation(3)a-SiPattering(Mask2)(2)SiN/a-Si/n+a-SiDepositionInsulator(1)GatePatterningisplayingyourvision!(Mask1)a-SiTFTBCEProfileisplayingyourvision!FromInnolux7”2005GEPatterning(Mask1)isplayingyourvision!GIandSELayerDepositionisplayingyourvision!SEPatterning(Mask2)CrossoverCovera

4、geActiveLayerisplayingyourvision!SDPatterning(Mask3)DataLine&SourceElectrodeisplayingyourvision!BackChannelEtchingDataLine&SourceElectrodeisplayingyourvision!CHLayerDepositionPassivationLayer(SiNx)isplayingyourvision!CHPatterning(Mask4)PassivationLayer(SiNx)isplayingyourvision!PEP

5、atterning(Mask5)PassivationLayer(SiNx)isplayingyourvision!PVD/Sputteringisplayingyourvision!MetalandAlloyGateSource/DrainAUOMo/AlNdMo/Al/MoTi/Al/TiMoWCMOMoN/AlNdMoN/Al/MoNHANNSTARMoWMo/AlNd/MoMo/AlNd/MoInnoluxAl/MoMo/Al/MoAUO(QDI)Al/TiTi/Al/TiNCPTCrCrAlNdNMoNbisplayingyourvision!M

6、oNbMo/Al/MoPECVDHeatStageSubstrateisplayingyourvision!ThinFilmQuality理想的閘極絕緣層(Gateinsulator)性質:良好的階梯覆蓋能力(GoodStepCoverage)適中的介電常數(DielectricConstant)高崩潰電壓(HighBreakdownVoltage)低薄膜應力(LowStress)與a-Si有良好的界面（Goodinterfacewitha-Sifilm)理想的保護層(PassivationLayer)性質:抗水氣能力佳(DiffusionBarrie

7、rAgainstMoisture)抗鹼金屬離子滲透力佳(DiffusionBarrierAgainstAlkaliIons)硬度佳，可承受機械性刮傷低製程溫度isplayingyourvision!ThePinHolesParticlea-Si/n+PECVDGateSiNxSiNx:4000Aa-Si:1500An+a-Si:300A洗淨、、Pinhole洗淨a-Si/n+GateSiNxSPUTTERINGSDMetalisplayingyourvision!TheSolutionofPinHolesGateGateSiNxPECVDSiNx:3000

8、APinholeGateGateSiNx洗淨PECVDSiNxPE