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1、SensorsandActuators,10(1986)379-398379HUMIDITYSENSORS*PRINCIPLESANDAPPLICATIONSNOBORUYAMAZOEDepartmentofMaterialsScrenceandTechnology,GmduateSchoolofEnganeenngScJences,KyushuUnwerwty39,Kasuga,Fukuoka,816(Japan)YASUHIROSHIMIZUDepartmentofMaterialsSczenceandEngrneenng,FacultyofEngrne
2、enng,NagasaksUnwerszty.Bunkyo-machr,Nagasakr,852(Japan)(ReceivedOctober24,1986,acceptedOctober31,1986)AbstractInresponsetothestrongdemandsforautomaticcontrolsystems,manykmdsofhumiditysensorsbasedonhumidity-sensitiveelectricalpropertieshavebeenmvestigatedandplacedonthemarketThehumid
3、ity-sensitivematerialsusedareclassifiedintothreegroupselectrolytes,organicpolymersandporousceramicsThispaperdescribestheprinciples,fabricationandapplicationsoftherespectivegroupsofhumiditysensors,togetherwithrecenttopicsincludingmmiaturlzatlonandmtegratlonofsensorsIntroductionRecen
4、tdevelopmentsmautomatedsystemshavemadeever-mcreasmgdemandsforvariouskmdsofphysicalandchemicalsensorsAshumidityISaverycommoncomponentinourenvironment,measurementsand/orcontrolofhumidityareimportantnotonlyforhumancomfortbutalsoforabroadspectrumofindustriesandtechnologiesAmongthediffe
5、renttypesofhumiditysensors,thosebasedonelectricalpropertiessuchasimpedance(orresistance)andcapacitancearebestsuitedtomodernautomaticcontrolsystemsGenerallyspeakmg,ahumiditysensorhastofulfillthefollowingrequirementstosatisfythewidestrangeofapphcatlons(1)goodsensitivitymawadehumidity
6、range,(2)quickresponse,(3)goodreproducibilityandnohysteresis,(4)fitnesstocuccuitry,(5)toughdurabilityandlonglife,(6)resistanttocontammants,(7)mslgnificantdependenceontemperature,(8)simplestructureandlowcostAsshownmTable1,theapplicationsofhumiditysensorsarewlde-spread,coveringdomest
7、icelectricapphances,automobiles,medicalservices,variousmdustnesandagricultureThepurposesofadoptinghumiditysensorsandtheoperationconditionsarequitedifferentdependingonthefieldofapplication,eachfieldrequiringaspecifichumiditysensorIn0250-6874/86/$3500ElsevlerSequola/PrmtedInTheNether
8、landsrange7040805050501001
