Michael quirk_半导体制造技术_第四章_硅和硅片制备ppt课件.ppt

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1、SemiconductorManufacturingTechnologyMichaelQuirk&JulianSerda©October2001byPrenticeHallChapter4SiliconandWaferPreparationObjectivesAfterstudyingthematerialinthischapter,youwillbeableto:1.Describehowrawsiliconisrefinedintosemiconductorgradesilicon.2.Explainthecrystalstruc

2、tureandgrowthmethodforproducingmonocrystalsilicon.3.Discussthemajordefectsinsiliconcrystal.4.Outlineanddescribethebasicprocessstepsforwaferpreparation,startingfromasiliconingotandfinishingwithawafer.5.Stateanddiscusssevenqualitymeasuresforwafersuppliers.6.Explainwhatise

3、pitaxyandwhyitisimportantforwafers.Semiconductor-GradeSiliconTable4.1CrystalStructureAmorphousMaterialsUnitCellsPolycrystalandMonocrystalStructuresCrystalOrientationSiHCl3PolycrystallinesiliconrodSiemensReactorforSGSiliconFigure4.1AtomicOrderofaCrystalStructureFigure4.2

4、AmorphousAtomicStructureFigure4.3UnitCellin3-DStructureUnitcellFigure4.4Faced-centeredCubic(FCC)UnitCellFigure4.5SiliconUnitCell:FCCDiamondStructureFigure4.6PolycrystallineandMonocrystallineStructuresPolycrystallinestructureMonocrystallinestructureFigure4.7AxesofOrienta

5、tionforUnitCellsZXY1110Figure4.8MillerIndicesofCrystalPlanesZXY(100)ZXY(110)ZXY(111)Figure4.9MonocrystalSiliconGrowthCZMethodCZCrystalPullerDopingImpurityControlFloat-ZoneMethodReasonsforLargerIngotDiametersCrystalseedMoltenpolysiliconHeatshieldWaterjacketSinglecrystals

6、iliconQuartzcrucibleCarbonheatingelementCrystalpullerandrotationmechanismCZCrystalPullerFigure4.10SiliconIngotGrownbyCZMethodPhotographcourtesyofKayexCorp.,300mmSiingotPhoto4.1CZCrystalPullerPhotographcourtesyofKayexCorp.,300mmSicrystalpullerPhoto4.2DopantConcentrationN

7、omenclatureTable4.2FloatZoneCrystalGrowthRFGasinlet(inert)MoltenzoneTravelingRFcoilPolycrystallinerod(silicon)SeedcrystalInertgasoutChuckChuckFigure4.11300mm200mm150mm125mm100mm75mm3²4²5²6²8²12²WaferDiameterTrendsFigure4.12WaferDimensions&AttributesTable4.388die200-mmwa

8、fer232die300-mmwaferIncreaseinNumberofChipsonLargerWaferDiameterFigure4.13DevelopmentalSpecificationsfor300-m