SEMI PR3.1-0699 PROPOSED SPECIFICATION FOR SURFACE MOUNT

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1、SEMIPR3.1-0699PROPOSEDSPECIFICATIONFORSURFACEMOUNTINTERFACEOFGASDISTRIBUTIONCOMPONENTS-COUNTERBOREDESIGNThisspecificationwastechnicallyapprovedbytheGlobalFacilitiesCommitteeandisthedirectresponsibilityoftheNorthAmericanFacilitiesCommittee.Currenteditionap

2、provedbytheNorthAmericanRegionalStandardsCommitteeonDecember18,1998.InitiallyavailableonSEMIOnLineApril1999;tobepublishedJune1999.inFigure2.Allgeometricdimensioningand1PurposetolerancingcomplieswithASMEY14.5and/orthe1.1Thisstandard,inconjunctionwiththemai

3、napplicableISOstandard.document,establishesthepropertiesandphysicalNOTE1:Alldimensionsareinmillimetersunlessotherwisedimensionsthatdefineacompletesurfacemountnoted.interfaceonthecomponentforthecounterboredesign.NOTE2:ThecenteredportinFigure1shallbetheinle

4、tportforallcomponents.2ScopeNOTE3:Thethroughholeinthecenterofthecounterbore2.1Thescopeisidenticaltothemaindocumentexceptwillbeelipticalifthethroughholeisdrilledatanangle.Inthatitislimitedtocomponentswhichwillemployathiscase,thediametertolerancesshallapply

5、tothemajorcounterboredesignforthesealinginterface.Thisdiameteroftheelipse.designcanbeusedwithmetalC-SealsorcompatibleNOTE4ThesmallthroughholeinFigure1isaleakchecksealingmethodologies.port.Itisintendedthatthismatewithagrooveonthesubstratewhichallowsaccesst

6、othesealingareas.3LimitationsNOTE5:ThebasewidthrequirementinFigure2appliesto3.1Thelimitationsaredetailedinthemaindocument.theendfittingsorendplates.TheMFCbodywidthhasamaximumrequirementof39.3mmbutdoesnothavea4ReferencedDocumentsminimumwidthrequirement.4.1

7、Thereferencedocumentsaredetailedinthemain7.3SealingSurfaceHardness—Thesealingsurfacedocument.(thebottomofthecounterbore)shallhaveaminimumhardnessof170Vickers.TestingshallbedoneperISO5Terminology6501.5.1Theterminologyisdetailedinthemaindocument.NOTE6:Thist

8、estwilldamagethesealingsurfaceandshouldbeconsidereddestructiveinnature.6OrderingInformation7.4SealingSurfaceRoughness—Thesealingsurface6.1Theorderinginformationisdetailedinthemain(thebottomofthecounterbore)shallhave