SEMI E64-0600 SPECIFICATION FOR 300 mm CART TO SEMI E15.1 DOCKING

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1、SEMIE64-0600SPECIFICATIONFOR300mmCARTTOSEMIE15.1DOCKINGINTERFACEPORTThisspecificationwastechnicallyapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.CurrenteditionapprovedbytheNorthAmericanReg

2、ionalStandardsCommitteeonApril10,2000.InitiallyavailableonSEMIOnLineApril2000;tobepublishedJune2000.Originallypublishedin1997;previouslypublishedJune1998.1Purpose5.2carrier—Anycassette,box,pod,orboatthat1.1Thisspecificationdefinesastandardlocationoncontainswafers(perSEMIE15).SEMI

3、E15.1-complianttoolsandrequirementstobe5.3cart—Afloor-basedcarriertransfervehicle.usedforinstallingadockinginterfaceforcarriertransportcarts.Itisintendedtopromoteaconsistent5.4docking—Theactoflocatingafloor-basedinterfacelocationbetweencarriertransportcartsandcarriertransportvehi

4、cleforcarriertransferto/fromSEMIE15.1-compliantwaferprocessorinspectionequipment.equipment.5.5loadfaceplane—Thefurthestphysicalverticalboundaryplanefromcarriercentroidontheside(s)of2Scopetheequipmentwhereloadingofthetoolisintended(per2.1Thisstandardcovers300mmSEMIE15.1-SEMIE15).c

5、omplianttoolsonly.Similarrequirementsforother5.6loadport—Theinterfacelocationonatoolwheretoolsarenotdefinedhere.carriersareplacedtoallowthetooltoprocesswafers2.2Thisstandarddoesnotpurporttoaddresssafety(perSEMIE15).issues,ifany,associatedwithitsuse.Itisthe5.7manualdocking—Contact

6、motioncontrolledbyresponsibilityoftheusersofthisstandardtoestablishtheoperatorofthecart.appropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.5.8transfer—Toeitherloadorunload(perSEMIE15).3Limitations6Requirements3.1Thisstandarddoesnotdef

7、ineinterfacefunction-ality,lead-in,accuracy,carriertransfer,compliance,6.1Thefollowingexclusionvolumeisreservedonimpact,orvibrationrestrictions.CartanddockingSEMIE15.1-complianttoolsfortheinstallationofainterfacedesignsshouldcomprehendphysicallimita-dockinginterfacedevice.Thisvol

8、umeisreferredtoastionsoftoolstowhichthey