SEMI C37-0699 SPECIFICATION FOR PHOSPHORIC ETCHANTS

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1、SEMIC37-0699SPECIFICATIONFORPHOSPHORICETCHANTSThisspecificationwastechnicallyapprovedbytheGlobalProcessChemicalsCommitteeandisthedirectresponsibilityoftheNorthAmericanProcessChemicalsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitte

2、eonApril23,1999.InitiallyavailableonSEMIOnLineMay1999;tobepublishedJune1999.ThisdocumentreplacesSEMIC2.3initsentirety.Originallypublishedin1981.1Purpose7Tolerances1.1Thepurposeofthisdocumentistostandardize7.1Thetolerancesallowedfortheabsolutepercentagerequir

3、ementsforphosphoricetchantsusedintheofeachofthecomponentsofaphosphoricetchantshallsemiconductorindustryandtestingprocedurestobe:supportthosestandards.TestmethodshavebeenshownPhosphoricAcid:±1.0%(±0.20meq/g)togivestatisticallyvalidresults.Thisdocumentalsoprov

4、idesguidelinesforgradesofphosphoricetchantsNitricAcid:±0.5%(±0.08meq/g)forwhichaneedhasbeenidentified.InthecaseoftheAceticAcid:±0.5%(±0.08meq/g)guidelines,thetestmethodsmaynothavebeenstatisticallyvalidatedyet.8Requirements8.1Therequirementsforphosphoricetcha

5、ntsfor2ScopeGrade1arelistedinTable1.2.1Thescopeofthisdocumentisallgradesofphosphoricetchantsusedinthesemiconductorindustry.9Grade1Procedures9.1TotalAcidity—Weighaccurately2.5to3.0gof3Limitationssampleinataredweighingbottle.Transferwithwater3.1None.toa25mLbea

6、keranddilutetoapproximately100mL.Add10dropsofthymolphthaleinindicatorsolutionand4ReferencedDocumentstitratewithstandardized1NsodiumhydroxidesolutionSEMIC1—SpecificationsforReagentstotheblueendpoint.Calculatethetotalacidity(A):mL´NofNaOHTotalAciditymeq=ASEMIC

7、2—SpecificationsforEtchants()g=Weightofsampleg()5Terminology9.2PhosphoricAcid—Weighaccurately2.5to3.0gofsampleinataredweighingbottle.Quantitatively5.1phosphoricetchant—anycombinationofphos-transferthesamplewith40to60mLofwaterintoaphoric,nitric,andaceticacids

8、withtherelativecompo-platinumorpolyfluorocarbondish.Evaporatethesitionexpressedintermsof85%phosphoricacid,70%solutiononasteambathinahood(1to2hours).Rinsenitricacid,andglacialaceticacid,respectiv