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1、全球半导体晶体生长计算著名的商业软件FEMAG-CZ之直拉法CzochralskiCrystalGrowthSimulationbyFEMAGSoftFEMAG-CZisaglobalcrystalgrowthsimulationsoftwaretakingintoaccountthefurnacegeometry,thematerialsandtheoperatingconditionsinordertoprovidetheuserwithalltheinformationrequiredforhisprocessdevelopmentandoptimi
2、zation.Globalheattransfer,Thermo-elasticstresses,Defectprediction,MeltflowandHeaterpower.Features·» Evolutionofthesolid/liquidinterfaceshape(dynamicsimulation)·» Thermalgradientsintheliquidandsolidphase·» Heatfluxesintheoverallfurnace·» Thermal-stressesinthecrystalandhotzonecompon
3、ents·» Continuousfeeding·» Species(dopantsandimpurities)segregationandconcentration·» MagneticfieldsSupportedLanguages:EnglishSupportedTechnologiesOperatingSystems:LinuxProgrammingLanguages:C/C++ProductType(s):SoftwareAdditionalProductInformationFEMAGfamilyproductsprovideso-called
4、''globalcalculations'',meaningthatalltheconstituentsofthefurnacearetakenintoaccount,togetherwithallheattransfermodeswithinandbetweenthem(conduction,convectionandradiation).Themodellingofconductionincludesthepossibilityoftemperature-dependentandanisotropicconductivity.Themodellingo
5、fradiativeheatexchangesassumesdiffuseradiationandcantakeintoaccountsemi-transparentmaterialsthroughwavelength-dependentradiativeproperties.Theflowinthemeltphasecanbemodelizedbyalaminarand/orturbulentmodel.Ittakesintoaccountnaturalconvection,duetotemperature-dependentdensityandsurf
6、acetension,andforcedconvectionduetocrystal,crucibleand/orpolycrystal-incaseoftheFZprocess-rotations,possiblyundertheinfluenceofamagneticfield(axial,cusp,rotatingortransverse).Meltflowcalculationalsoconsiderstheeffectofgasflowandoftangentialforcesduetoinduction(ifany)onmeltsurface.
7、Theflowinthegasphase,asaresultofanimposedflowrateatgasinletandoftemperature-dependentdensity,canbemodelizedbyalaminaroraturbulentmodel.Theheatingoftheprocessismodelized:ohmicheaters(oneorseveral,coupledorindependent)orinductors.Inthecaseofmultipleheaters,theuserhasthepossibilityto
8、controltheheatingpowersbyimposing
