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1、晶体生长模拟软件FEMAG之DynamicSimulationoftheEntireCrystalGrowthProcess:Multi-ScaleAnalysisofMeltFlowTransientsV.Regnier,L.Wu,B.Delsaute,F.Bioul,N.VandenBogaert,F.DupretCESAME,UniversitécatholiquedeLouvain,E-mail:fd@mema.ucl.ac.beAbstractThispaperinvestigatesthetransientmeltflowevolutionduringa
2、completeCzochralskicrystalgrowthprocess.Twobasictimescalesareconsidered.Theshortscaleconcernsthebasictransientsassociatedwithflowoscillationsatdifferentprocessstages.Accurateunderstandingoftheflowmechanismsatthisscaleisrequiredtodevelopanaverageaxisymmetricflowmodelforcompletedynamicsi
3、mulations.Thelongtimescaleisassociatedwiththetransientscausedbytheslowersystemevolutionoccurringduringthecompletegrowthprocess.Inorder10tofocusonthefundamentaleffectsgoverningtheflow,amodelproblemisconsideredwheretheliquidisplacedintoapossiblyrotatingcontainerwhileadiskofsmallerdiamete
4、rrotatesonitstopsurface.Boththecontainerandthediskareisothermal.Severaltransienteffectsareinvestigatedincludingtheeffectofdiskradiusincreaseordecrease,andabruptchangesofdiskorcontainertemperatureorrotationrate.Introduction:dynamicmodelingofcrystalgrowthbymeansoftheFEMAGsoftwareThereisi
5、ncreasingdemandtodayforrobust,reliableanduser-friendlysoftwaretomodelbulkgrowthtechniquessuchastheCzochralski(Cz),LiquidEncapsulatedCzochralski(LEC),FloatingZone(FZ)andVerticalBridgman(VB)processes.Theaimistohelppredict,designandcontrolthegrowthprocesses,andtobetterunderstandthefactors
6、affectingcrystalquality.However,thegrowthtechniquesaremoreandmorecomplex,andoptimizationcanbeachievedonlybyuseofsuitablenumericalmodelingthataccountsfortheseverelynon-linearphysicalphenomenainvolvedaswellasforthehighsystemthermalinertia.Theresultingproblemiscoupled,global,nonlinearandd
7、ynamic.Ontheotherhand,accuratepredictionofcrystalqualityrequires10bothappropriatemodelingofthegoverningphysics,andhighlyaccuratedynamicnumericalmethodsforcomputingtheevolutionofthesolid-liquidinterfaceshapeandthetemperaturefieldgradientinitsvicinity.TheFEMAGsimulationsoftwaredevelope