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1、晶体生长软件FEMAG-CZ之直拉法CzochralskiCrystalGrowthSimulationbyFEMAGSoftFEMAG-CZisaglobalcrystalgrowthsimulationsoftwaretakingintoaccountthefurnacegeometry,thematerialsandtheoperatingconditionsinordertoprovidetheuserwithalltheinformationrequiredforhisprocessdevelopmentandopt
2、imization.Globalheattransfer,Thermo-elasticstresses,Defectprediction,MeltflowandHeaterpower.Features·» Evolutionofthesolid/liquidinterfaceshape(dynamicsimulation)·» Thermalgradientsintheliquidandsolidphase·» Heatfluxesintheoverallfurnace·» Thermal-stressesinthecryst
3、alandhotzonecomponents·» Continuousfeeding·» Species(dopantsandimpurities)segregationandconcentration·» MagneticfieldsSupportedLanguages:EnglishSupportedTechnologiesOperatingSystems:LinuxProgrammingLanguages:C/C++ProductType(s):SoftwareAdditionalProductInformationFE
4、MAGfamilyproductsprovideso-called''globalcalculations'',meaningthatalltheconstituentsofthefurnacearetakenintoaccount,togetherwithallheattransfermodeswithinandbetweenthem(conduction,convectionandradiation).Themodellingofconductionincludesthepossibilityoftemperature-d
5、ependentandanisotropicconductivity.Themodellingofradiativeheatexchangesassumesdiffuseradiationandcantakeintoaccountsemi-transparentmaterialsthroughwavelength-dependentradiativeproperties.Theflowinthemeltphasecanbemodelizedbyalaminarand/orturbulentmodel.Ittakesintoac
6、countnaturalconvection,duetotemperature-dependentdensityandsurfacetension,andforcedconvectionduetocrystal,crucibleand/orpolycrystal-incaseoftheFZprocess-rotations,possiblyundertheinfluenceofamagneticfield(axial,cusp,rotatingortransverse).Meltflowcalculationalsoconsi
7、derstheeffectofgasflowandoftangentialforcesduetoinduction(ifany)onmeltsurface.Theflowinthegasphase,asaresultofanimposedflowrateatgasinletandoftemperature-dependentdensity,canbemodelizedbyalaminaroraturbulentmodel.Theheatingoftheprocessismodelized:ohmicheaters(oneors
8、everal,coupledorindependent)orinductors.Inthecaseofmultipleheaters,theuserhasthepossibilitytocontroltheheatingpowersbyimposingaspecifictem
