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1、全球半导体晶体生长计算著名的商业软件FEMAG之DynamicSimulationoftheEntireCrystalGrowthProcess:Multi-ScaleAnalysisofMeltFlowTransientsV.Regnier,L.Wu,B.Delsaute,F.Bioul,N.VandenBogaert,F.DupretCESAME,UniversitécatholiquedeLouvain,E-mail:fd@mema.ucl.ac.beAbstractThispaperinvestigat
2、esthetransientmeltflowevolutionduringacompleteCzochralskicrystalgrowthprocess.Twobasictimescalesareconsidered.Theshortscaleconcernsthebasictransientsassociatedwithflowoscillationsatdifferentprocessstages.Accurateunderstandingoftheflowmechanismsatthisscaleisr
3、equiredtodevelopanaverageaxisymmetricflowmodelforcompletedynamicsimulations.Thelongtimescaleisassociatedwiththetransientscausedbytheslowersystemevolutionoccurringduringthecompletegrowthprocess.Inordertofocusonthefundamentaleffectsgoverningtheflow,amodelprobl
4、emisconsideredwheretheliquidisplacedintoapossiblyrotatingcontainerwhileadiskofsmallerdiameterrotatesonitstopsurface.Boththecontainerandthediskareisothermal.Severaltransienteffectsareinvestigatedincludingtheeffectofdiskradiusincreaseordecrease,andabruptchange
5、sofdiskorcontainertemperatureorrotationrate.Introduction:dynamicmodelingofcrystalgrowthbymeansoftheFEMAGsoftwareThereisincreasingdemandtodayforrobust,reliableanduser-friendly6softwaretomodelbulkgrowthtechniquessuchastheCzochralski(Cz),LiquidEncapsulatedCzoch
6、ralski(LEC),FloatingZone(FZ)andVerticalBridgman(VB)processes.Theaimistohelppredict,designandcontrolthegrowthprocesses,andtobetterunderstandthefactorsaffectingcrystalquality.However,thegrowthtechniquesaremoreandmorecomplex,andoptimizationcanbeachievedonlybyus
7、eofsuitablenumericalmodelingthataccountsfortheseverelynon-linearphysicalphenomenainvolvedaswellasforthehighsystemthermalinertia.Theresultingproblemiscoupled,global,nonlinearanddynamic.Ontheotherhand,accuratepredictionofcrystalqualityrequiresbothappropriatemo
8、delingofthegoverningphysics,andhighlyaccuratedynamicnumericalmethodsforcomputingtheevolutionofthesolid-liquidinterfaceshapeandthetemperaturefieldgradientinitsvicinity.TheFEMAGsimulationsoftwared
